COOLED MID-WAVE INFRARED LENSES - AN OVERVIEW

The SOI System was adopted to aid fabrication of large aperture lenses. The SOI wafer has a thin layer of silicon dioxide (SiO2) on top of a thick Si substrate and buried beneath a thin Si device layer; the device layer will likely be etched to determine higher element ratio Si nanorods though the buried oxide provides an etch prevent to aid fabric